反应溅射法 meaning in English
reactive sputtering
Examples
- The designed films of sio2 and sio2 / si are prepared on sample and hemisphere dome of sapphire by radio frequency magnetron reactive sputtering method
利用射频磁控反应溅射法，在蓝宝石试片和半球形头罩上制备出所设计的sio _ 2和sio _ 2 si增透膜系。 - ( 4 ) the study of the optical band gap of cnx film by uv - vis spectrophotometer . ( 5 ) by using the microhardness tester , we study the hardness of cnx film on the ceremic substrate by dc magnetron reactive sputtering with the feed ar and n2 flow rate , film thickness , substrate temperature and substrate bias
( 5 )用直流磁控反应溅射法，以陶瓷作为衬底，对在ar和n2不同流量、不同膜厚、不同基片温度和对基片施加不同偏压下沉积的薄膜，用< wp = 4 >显微硬度计研究测试了不同工艺参数下的相应硬度。