刻蚀环 meaning in English
etched rings
Examples
- Besides of those , the pattern of the target is novel after the long time ' s erosion . there is no erosion ring on its surface , so we can use this method to improve the utilization rate greatly
更重要的是:此时靶面被刻蚀的状态比普通磁控溅射的要均匀得多,刻蚀深度值是从边缘到中间逐渐增大的,在靶面并没有出现通常的刻蚀环,因此这种磁控配置大大提高了靶的利用率。