元件面 meaning in English

component side(c/s)

In this paper , the author study the measurement method and instrument of the euv / x - ray optical component , improve the design of the measuring apparatus - long trace profiler ltp already existing , provide a kind of newly long trace profiler ltp - iii , which is used to measure the slope error
本文主要是研究euv x - ray光学元件面形误差的测量方法与测量仪器。对已有的测量仪器长轨面形仪ltp仪器进行了改进设计，提供一种新型的长轨面形仪ltp - ，用于测量光学元件的倾斜度误差。