偏心距离 meaning in English
eccentric distance
eccentric throw
offsetting distance
Examples
- Contrasting the results of simulation and the experiment for depositing the 3 inch thin films by icds technique , the center position of substrate and the target is in a 18mm offset , the thickness distribution homogeneity is under 8 % . based on the analyses of the theoretic heat distribution for the radiant heating system , a 3 inch size radiant heater fitting for the requirement is designed and made , whose temperature difference is under 6 %
其次，对3英寸范围内的膜厚分布进行了理论模拟，在此基础上和试验结果对比分析，发现：在倒筒靶直流溅射装置下，如果采用一种让基片中心和靶中心处于相对偏心距离为18mm的位置来制备3英寸薄膜，其膜厚分布的均匀度范围控制在8以内。