xecl meaning in English
氙氯
Examples
- At last we measure parameters of new excimer laser , the experimental measuring results show that our xecl excimer laser has better characters , and its output is excellent compared to others
最后论文对试制成功的准分子激光器参数进行了测试。试验结果表明激光特性良好,与同类相比,准分子激光装置激光输出情况良好。 - The xecl excimer laser have broad applications in industry manufacture , scientific research , biomedical engineering , nuclear fusion , photoelectron , semiconductor etc . today , the excimer laser has been used in the serial of haloid excimer laser mainly , such as xecl , krf , xef , arf excimer laser
准分子激光在工业制造、科学研究、生物医学、核聚变、光电子、半导体等重要的课题研究领域上有广阔的发展远景。特别是准分子激光在光电材料、光电技术上有得天独厚的优良性能。 - Firstly , the paper discusses the characters , principles of excimer laser , and study on pulse discharge process . secondly , for the purpose of designing excimer laser , i spent a lot of time to researsh and finish electrode designing , reducing circuit inductance , spark gap designing , ns discharge , uv preionization , glow discharge
本论文首先对准分子激光特点,原理,脉冲放电进行了评述,其次,以试制xecl准分子激光器为目的,探索并完成了电极设计、回路电感减小方法、火花开关设计、 ns陡前沿放电、紫外预电离、辉光放电、脉冲功率技术研究。 - Due to great advantage of the excimer laser in photoelectron material , photoelectron technology research , so in this thesis , a xecl excimer laser is designed in order to solve some problem in semiconductor film , cmr film , quartz film and other kind of film application , optical etching field , interaction between laser and material , material plasma study . the parameters of the excimer laser is e also measured and analyzed
因此本文以气相沉积、外延生长、巨磁薄膜、金刚石及其它薄膜制备及后续的光刻,激光与物质的相互作用,等离子体研究为目的,研制获得了激光脉宽18ns ,单脉冲能量150mj ,矩形光斑大小2cm 1cm ,束散角3mrad ,最高重复频率5hz的xecl准分子激光器。