preannealing meaning in English

事先退火
预先退火

In this paper , the relationship of the thermal donor with point defects was investigated by injection of different concentration and distribution vacancy via 1250 ? , rtp preannealing in different gases ( n2 o2 , ar ) . the influence of rtf preannealing on generation at 450 ? and annihilation at 650 ? of thermal donors ( td ' s ) was not detected
本论文通过不同气氛( n _ 2 , o _ 2 , ar ) 1250 30s高温rtp预处理在硅片中引入不同浓度和分布的空位，进而用四探针和扩展电阻研究450不同时间热施主的生成特性和650热施主的消除特性，从而确定热施主和点缺陷之间的关系。