prealigner meaning in English
预对准器
Examples
- This paper surveys robotic wafer handling system for integrate circuit manufacturing , and reviews the operating principle and research results of the main components of the system , i . e . , wafer robot and prealigner
摘要介绍了面向集成电路制造业的硅片机器人传输系统，综述了其主要组成部分硅片机器人和预对准装置的工作原理及国内外研究成果。