icds meaning in English
儿童发展服务
Examples
- In this dissertation , a special shape cylindrical target of ybco is designed and sintered for the inverted cylindrical dc sputtering ( icds ) device . then , the thickness distribution of the 3 inch size thin films has been simulated
本文针对3英寸ybco高温超导双面薄膜的制备技术，研究了靶材烧制、薄膜膜厚分布、加热器设计与制作，制备出了具有87k超导性的3英寸ybco双面薄膜样品。 - Contrasting the results of simulation and the experiment for depositing the 3 inch thin films by icds technique , the center position of substrate and the target is in a 18mm offset , the thickness distribution homogeneity is under 8 % . based on the analyses of the theoretic heat distribution for the radiant heating system , a 3 inch size radiant heater fitting for the requirement is designed and made , whose temperature difference is under 6 %
其次，对3英寸范围内的膜厚分布进行了理论模拟，在此基础上和试验结果对比分析，发现：在倒筒靶直流溅射装置下，如果采用一种让基片中心和靶中心处于相对偏心距离为18mm的位置来制备3英寸薄膜，其膜厚分布的均匀度范围控制在8以内。 - The purpose of this dissertation is to study the effect of substrate on the characteristics and microstructure of high temperature superconducting yba2cu3o7 - thin film , and well c - axis oriented epitaxial ybco thin films have been deposited on both laalo3 ( 100 ) and r - plane sapphire al2o3 ( 102 ) substrates by inverted cylindrical dc sputtering ( icds ) technique
<中文摘要> =本论文的目的是研究基片对薄膜结构和性能的影响关系，采用倒筒靶直流溅射技术在在laalo3 ( 100 )和r -平面的蓝宝石（ al2o3 ( 102 ) ）两种基片上制备出c轴取向的外延高温超导yba2cu3o7 -薄膜。