ebsd meaning in English
物理 化学 电子
Examples
- Measurement and analysis of microtexture in cvd free standing diamond films by ebsd
自支撑金刚石薄膜微区织构的影响分析 - Ebsd analysis of local elastic strain fields in semiconductor structures
半导体结构中局域弹性应变场的电子背散射衍射分析 - Studies on the microstructure of copper interconnects include the determination of grain size by afm and sem , the measurement of texture by xrd and ebsd , the evaluation of barriers by xps and aes
铜互连线的微观结构的研究:通过afm 、 sem 、 tem等的分析方法对铜膜及铜互连线薄膜的晶粒尺寸进行了评价。 - The results show the grain size becomes larger along with elevated temperature and the grain size in interconnects does not change evidently after annealed at 200 ? because of the effect of the trench structure
结果显示热处理后铜膜晶粒长大,但铜互连线薄膜由于沟槽结构对晶粒的长大有阻碍作用。利用xrd和ebsd测试方法对铜膜及铜互连线薄膜的织构进行评价。